Polarization is a fundamental property of light waves. Originating from polarization, there are two categories of techniques: polarimetry and ellipsometry. Polarimetry is the technique for measuring ...

Institute for Technical Physics and Materials Science, Centre for Energy Research, Budapest 1525, Hungary Department of Electrical and Electronic Engineering, Institute of Physics, Faculty of Science ...

This chapter provides a brief introduction to ellipsometry starting with an overview of light polarization, definition of ellipsometric measurable quantities and instrumentation. It covers the ...

ABSTRACT: This paper presents a study of amorphous SiOx thin films by means of Variable Angle Spectroscopic Ellipsometry (VASE) technique. Tauc Lorentz, Lorentz and Cauchy models have been used to ...

Abstract: The concept of biosensor based on imaging ellipsometry was proposed in 1995. Imaging ellipsometry is used for the acquisition of the bio-molecule interaction information between biomolecule ...

Ellipsometry and reflectometry are optical measurement techniques used for surface analysis and thin-film characterization. 1 Both methods rely on light reflection but differ in their approach.