White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...

"Park NX-Hybrid WLI introduces a total complementary metrology solution for semiconductor applications requiring both large area scanning and nanoscale metrology," comments Dr. Ryan Yoo, Executive VP, ...

Optical Profilometry employs light to measure surface contours and roughness by analyzing the interaction between light waves and the surface under examination. It utilizes various principles such as ...

A side-by-side comparison of the resolution, strengths, and limitations of common surface metrology techniques An in-depth look at advances in and practical considerations for white-light ...

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