Computing method for extreme ultraviolet lithography imaging with aberration consideration
spiedigitallibrary.org
Computing method for extreme ultraviolet lithography imaging with aberration consideration
Extreme ultraviolet (EUV) lithography technology is a key technology used to manufacture very small layout patterns on advanced integrated circuits. Concurrently, computational lithography plays a crucial role in advanced lithographic processes. In computational lithography, the establishment of an EUV lithography imaging model and the ...
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