ASML Developing Next-Gen EUV Lithography
ieee.org
ASML Developing Next-Gen EUV Lithography
Productivity gains will continue through the next two or three chip generations, but after that we’ll need something bigger and better
2018年12月5日
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The full EUV optical light path - Inside the TWINSCAN NXE:3400 EUV lithography machine | ASML on Make a GIF
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What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML
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What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML
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At ASML San Diego — the global Center of Excellence for EUV light source development — engineers, scientists, and innovators work together to create the technology that powers the world's most advanced chips. From intercepting tin droplets with lasers to solving challenges that haven’t been defined yet — this is where the EUV light source truly comes to life. | ASML
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At ASML San Diego — the global Center of Excellence for EUV light source development — engineers, scientists, and innovators work together to create the technology that powers the world's most advanced chips. From intercepting tin droplets with lasers to solving challenges that haven’t been defined yet — this is where the EUV light source truly comes to life. | ASML
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The full EUV optical light path - Inside the TWINSCAN NXE:3400 EUV lithography machine | ASML on Make a GIF
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What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML
2:43
What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML
視聴回数: 2798 回5 か月前
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What’s the reticle in a lithography system? Find out in this clip. Check out all our EUV systems, and the technology behind them: http://ms.spr.ly/6182wLVGO | ASML
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